Principles of interference microscopy for the measurement of surface topography
By P. Groot. 2015
370 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Computational Mechanics, Computer Vision and Pattern Recognition
View Paper: https://www.semanticscholar.org/paper/85a86941ea274680ea62ea608c4b1bb3c43dc719
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In Biomedical Engineering
In Computational Mechanics
Citations in the corpus
- Quantitative characterization of surface topography using spectral analysis (2016, background): “[61] and [62]), sub-nanometer resolution can be achieved in the vertical direction while the lateral resolution is diffraction limited to typical ranges of 500 nm–1 μm.”