A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches

By R. Gordon, D. Hausmann, E. Kim, J. Shepard. 2003

346 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/830716c862ba39124e86c06517b11da5a69bc23a