The Use of Functionally Graded Poly-SiGe Layers for MEMS Applications

By Ann Witvrouw, A. Mehta. 2005

384 citations recorded by the source corpus.

It is difficult to meet all the different material and economical requirements posed to a MEMS structural layer that can be integrated with the electronics on the same substrate using a single layer process. Therefore a multilayer process, which uses a combination of a CVD crystallization layer and a high-growth rate PECVD bulk layer was developed. High-quality films with excellent electrical and mechanical properties can be obtained at low temperature (#450°C) and high deposition rates (~100 nm/min). Fine-tuning of the stress gradient is accomplished by the use of a top stress compensation layer, whose optimal thickness was estimated from an evaluation of the stress gradient profile over thickness. These layers have been used for processing a 10 µm thick poly-SiGe gyroscope on top of a standard 0.35 µm CMOS process.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/82c3d3f7ee4eb68064314cebfad39625db2474c3

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In Biomedical Engineering

In Electrical and Electronic Engineering

Citations in the corpus

A size-dependent model for functionally graded micro-plates for mechanical analyses (2013, background): “Therefore, a multilayer process for reaching a MEMS structural layer with variable properties in the thickness, i.e. bottom with the desired electrical properties and top as the stress compensation part, is a great demand that recently has been developed (Witvrouw and Mehta, 2005).”
A nonlocal zeroth-order shear deformation theory for free vibration of functionally graded nanoscale plates resting on elastic foundation (2016, background): “…nano-sized system and devices such as sensors, nanowires, atomic force microscopes, actuators, thin films to improve their performances (Fu et al. 2003, Lee et al. 2006, Lu et al. 2011, Lun et al. 2006, Moser and Gijs 2007, Rahaeifard et al. 2009, Stölken and Evans 1998, Witvrouw and Mehta 2005).”
On vibration properties of functionally graded nano-plate using a new nonlocal refined four variable model (2015, background): “…(MEMS/NEMS), such as the components in the form of shape memory alloy thin films with a global thickness in micro- or nano-scale (Fu et al. 2003, Witvrouw and Mehta 2005, Lü et al. 2009), electrically actuated MEMS devices (Hasanyan et al. 2008, Mohammadi-Alasti et al. 2011, Zhang and Fu 2012),…”
Size-dependent mechanical behavior of functionally graded trigonometric shear deformable nanobeams including neutral surface position concept (2016, background): “Recently, nanoscale structures have attracted considerable attention among the researchers community for the future application of nano electro-mechanical systems (NEMS) and atomic force microscopy (AFM) (Dai et al. 1996, Lourie et al. 1998).”
A size-dependent four variable refined plate model for functionally graded microplates based on modified couple stress theory (2015, background): “Recently, the applications of FGMs have been extended to the micro/nano engineering fields so that functionally graded (FG) micro/nano beams and plates are extensively utilized in atomic force microscopy and micro- and nano-electro-mechanical systems (MEMS and NEMS) [1–4].”