Etching Mechanism of Vitreous Silicon Dioxide in HF-Based Solutions

By D. Knotter. 2000

289 citations recorded by the source corpus.

Subfields: Bioengineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/82a9de3fef2f665c4ca40d3db90d1fbe33acc037