Atomic Layer Deposition of Functional Layers for on Chip 3D Li‐Ion All Solid State Microbattery

By M. Letiche, E. Eustache, Jeremy Freixas, Arnaud Demortière, V. De Andrade, L. Morgenroth, P. Tilmant, F. Vaurette, D. Troadec, P. Roussel and 2 more. 2017

140 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/8275c160a7e0163ede1b5ae446d7335744d9d812