Advances in Scanning Force Microscopy for Dimensional Metrology

By H. Danzebrink, Ludger Koenders, G. Wilkening, A. Yacoot, H. Kunzmann. 2006

156 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Computational Mechanics

View Paper: https://www.semanticscholar.org/paper/81fa42aefa8ba66d91e6ebce210476e7110b7d2d

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Gerry Byrne
2. Fengzhou Fang
3. Wei Gao
4. Hans Nørgaard Hansen
5. Yuebin B. Guo
6. Tugrul Özel
7. Yigit Karpat

In Computational Mechanics

1. Yuebin B. Guo

Citations in the corpus

• On-machine and in-process surface metrology for precision manufacturing (2019, unknown): “The measuring force can be further decreased in an AFM, together with an improvement in the lateral resolution, due to the low force atomic interaction between the silicon cantilever tip and the surface [33].”
• Nanomanufacturing—Perspective and applications (2017, methodology): “ment technologies are presented as an update of the related past CIRP keynotes [38,94,215].”