Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication

By C. Black, Kathryn W. Guarini, K. Milkove, S. Baker, T. P. Russell, M. Tuominen. 2001

282 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/81447a10fadc7e6932007dd0515b3d5d35a223b9