‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications

By A. Devi. 2013

156 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/8142a3358183dd6e1ffac0c80bb55393e0c1cc39

How researchers see this paper

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In Electrical and Electronic Engineering

  1. Zhi Zheng
  2. Yong Zhang
  3. Weilie Zhou
  4. Xiaotao Zu

In Materials Chemistry

  1. Zhi Zheng
  2. Yong Zhang
  3. Weilie Zhou
  4. Xiaotao Zu

Citations in the corpus