Plasma atomic layer etching using conventional plasma equipment

By A. Agarwal, Mark J. Kushner. 2009

148 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/81007c2949f3ced06dd79f621289d1378df88966

Citations in the corpus

• Pulsed plasma etching for semiconductor manufacturing (2014, unknown): “precision [125].”