Piezoelectric aluminum nitride thin films for microelectromechanical systems

By Gianluca Piazza, V. Felmetsger, Paul Muralt, Roy H. Olsson III, Richard C. Ruby. MRS bulletin, 2012

216 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Condensed Matter Physics

View Paper: https://www.semanticscholar.org/paper/80ae8070ccd55e0e9a9823a3626d3f25aeeff2dc