Low-Temperature Plasma Processing of Materials: Past, Present, and Future

By R. D'agostino, P. Favia, C. Oehr, M. Wertheimer. 2005

212 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/7f37622461593d86f5200d70a81eac1546a1cbb3