Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol

By A. Dameron, D. Seghete, B. B. Burton, Stephen D. Davidson, A. Cavanagh, J. A. Bertrand, S. George. 2008

322 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/7d5f0c7f5ab3fbfa74a41c7ff23ad5586912c61a