Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

By M. Akiyama, K. Kano, Akihiko Teshigahara. 2009

350 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Condensed Matter Physics, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/7d30fe013054014dc5beed81ebf95a7c4cc544a7