Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films
By M. Akiyama, K. Kano, Akihiko Teshigahara. 2009
350 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Condensed Matter Physics, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/7d30fe013054014dc5beed81ebf95a7c4cc544a7