A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics

By Wule Zhu, Zhiwei Zhu, P. Guo, Bingfeng Ju. 2018

152 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering

View Paper: https://www.semanticscholar.org/paper/7c609c05b45e1fb7aa011c100c4112c767f9b16c