Influence of nitrogen content on the structural, mechanical and electrical properties of TiN thin films

By F. Vaz, J. Ferreira, E. Ribeiro, L. Rebouta, S. Lanceros‐Méndez, J. Mendes, E. Alves, P. Goudeau, J. Rivière, F. Ribeiro and 3 more. 2005

169 citations recorded by the source corpus.

Subfields: Electronic, Optical and Magnetic Materials, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/7c5e9dbdeacfbc517e16e005e75ceccb7f83249f