An overview of supercritical CO 2 applications in microelectronics processing

By Gina L. Weibel, C. Ober. 2003

180 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/7b4a7b6b3de0240e84c62292b454915b949b4b3c