Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature

By E. Terzini, P. Thilakan, C. Minarini. 2000

161 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Polymers and Plastics

View Paper: https://www.semanticscholar.org/paper/7af95d30f30f3ca8b38f42b1a9d2cbf974aa35e2