Damage at hydrogenated amorphous/crystalline silicon interfaces by indium tin oxide overlayer sputtering

By B. Demaurex, S. De Wolf, A. Descoeudres, Z. Holman, Christophe Ballif. 2012

232 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/7a93c8595e76329495887da62a085c4164ed20ef