Magnetron sputtering – Milestones of 30 years

By G. Bräuer, B. Szyszka, M. Vergöhl, R. Bandorf. 2010

319 citations recorded by the source corpus.

Subfields: Aerospace Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/7a5e85723b4ad0837165e6d93d7b7f9d07c5d568

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Aerospace Engineering

1. Chongchong Tang

In Materials Chemistry

1. Chongchong Tang

In Mechanics of Materials

1. Marcello Cabibbo
2. E. Santecchia
3. Farayi Musharavati
4. Erfan Zalnezhad
5. S. Spigarelli
6. A. Hamouda

Citations in the corpus

• Oxidation kinetics of Cr-coated zirconium alloy: Effect of coating thickness and microstructure (2020, background): “Among the coating techniques, magnetron sputtering systems have many favour able parameters [17,18]:”
• Wear resistance investigation of titanium nitride-based coatings (2015, background): “target material, the most common PVD techniques are classified as follows: (i) sputtering deposition [54-55], (ii) cathodic-arc deposition [56-57], (iii) electron beam physical vapor deposition (EB-PVD) [58-59], (iv) pulsed laser deposition (PLD) [6061], and (v) ion beam assisted deposition (IBAD) [”