HCl Flow-Induced Phase Change of α-, β-, and ε-Ga2O3 Films Grown by MOCVD

By Haiding Sun, Kuang-Hui Li, C. G. T. Castanedo, S. Okur, G. Tompa, T. Salagaj, S. Lopatin, A. Genovese, Xiaohang Li. 2018

181 citations recorded by the source corpus.

Subfields: Electronic, Optical and Magnetic Materials, Materials Chemistry, Renewable Energy, Sustainability and the Environment

View Paper: https://www.semanticscholar.org/paper/79ca61767bb15a88e02cea852eb3ecf62a6cb5bd