Evolution of the microstructure in microcrystalline silicon prepared by very high frequency glow-discharge using hydrogen dilution

By E. Vallat-Sauvain, U. Kroll, J. Meier, Arvind Shah, J. Pohl. 2000

146 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/7939d9840ca6cbdf9a3de0d4e34dbf874e555964