Specular spectroscopic scatterometry

By Xinhui Niu, Nickhil H. Jakatdar, Junwei Bao, Costas J. Spanos. 2001

166 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Computational Mechanics, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/78df52779c4b2210e93e9d137bbc655ed92bc337

Citations in the corpus

• An insight into optical metrology in manufacturing (2020, unknown): “Around the year 2000 [246, 247], ellipsometry was introduced to the measurement of CDs of grating structures.”