Capacitive Micromachined Ultrasonic Transducers: Theory and Technology

By A. Ergun, G. Yaralioglu, B. Khuri-Yakub. 2003

212 citations recorded by the source corpus.

Subfields: Control and Systems Engineering, Mechanics of Materials, Radiology, Nuclear Medicine and Imaging

View Paper: https://www.semanticscholar.org/paper/789b6cb2e0fe7eae6981fa33eb08dd2b819648b0

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1. Arezoo Emadi
2. Jaewoo Park
3. Aashish Joseph
4. Haleh Nazemi

Citations in the corpus

• Advanced Micro- and Nano-Gas Sensor Technology: A Review (2019, background): “In this design, the top membrane and the bottom electrode act as a capacitor where changes in the device-sensing material can influence the device capacitance [52].”