Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering

By W. Chan, E. Chason. 2007

451 citations recorded by the source corpus.

Subfields: Computational Mechanics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/7838f36cfe7d00db29ccfde6eb5170dea01781ca

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Materials Chemistry

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

In Mechanics of Materials

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

Citations in the corpus

• Perspectives on oblique angle deposition of thin films: From fundamentals to devices (2016, background): “, the effects of sputtering efficiency [203] and relocation phenomena on the angle of incidence and energy of the impinging ions [210]) have so far prevented any predictive description of tendencies.”