Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining

By K. Yamauchi, H. Mimura, K. Inagaki, Y. Mori. 2002

258 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/77814031d7e0c65d6014ddce1c621f83a400f85c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Soichiro Handa
2. D. Yamakawa
3. K. Inagaki

Citations in the corpus

• Breaking the 10 nm barrier in hard-X-ray focusing (2010, methodology): “The elliptically curved substrate surface of the focusing mirror was fabricated by elastic emission machining and stitching interferometr”