Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry

By Seung-Gu Lim, S. Kriventsov, T. Jackson, J. Haeni, Darrell Schlom, A. Balbashov, R. Uecker, P. Reiche, J. Freeouf, G. Lucovsky. 2002

343 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/77490bbcb4c8638112f3dbdc4671a6f2eee7007a