PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

By Zoltán Donkó, J. Schulze, B. Heil, U. Czarnetzki. 2009

157 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/762efc0157c4acc7c3ac6032a3ac03c1c95ab995