Atomic layer deposition of titanium nitride from TDMAT precursor

By J. Musschoot, Qi Xie, D. Deduytsche, S. V. D. Berghe, R. Meirhaeghe, C. Detavernier. 2009

147 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/761fbc34c0ed28a4f444157659431a4e52401329