Gate stack technology for nanoscale devices

By B. Lee, P. Kirsch, Seung–Hoon Song, R. Choi, R. Jammy. 2006 IEEE Nanotechnology Materials and Devices Conference, 2006

159 citations recorded by the source corpus.

The historical evolution of gate stack technology for silicon devices is reviewed to provide insight on the challenges in this technology for scaled nanoscale CMOS devices and non-Si-based devices.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/75682d8dd16604e6bc2f6b94163f35780b5a98c7