Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators

By H. Loebl, M. Klee, C. Metzmacher, W. Brand, R. Milsom, P. Lok. 2003

147 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Condensed Matter Physics

View Paper: https://www.semanticscholar.org/paper/754840c9c657e210a37b9ae2a0c59407e1c91b58