High-performance ZnO thin-film transistors on gate dielectrics grown by atomic layer deposition

By P. Carcia, R. S. Mclean, M. Reilly. 2006

272 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/74c45687646d6687455d2f96ea47516e481dc1f3