Physical and electrical characterization of ultrathin yttrium silicate insulators on silicon

By J. J. Chambers, G. Parsons. 2001

192 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/749b91931b9f89c9ae03069bccdf9aba6a20182c