ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone

By Xinye Liu, S. Ramanathan, Ana Longdergan, A. Srivastava, E. Lee, T. Seidel, Jeffrey T. Barton, D. Pang, R. Gordon. 2005

202 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/73f51c3f47d35ba22eac920c6ded40f23dc470fc