TEM Sample Preparation and FIB-Induced Damage

By J. Mayer, L. Giannuzzi, T. Kamino, J. Michael. 2007

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Generation of 3D representative volume elements for heterogeneous materials: A review (2018, background): “Nevertheless, FIB milling may introduce surface relaxation or severe damage [498,499].”
Ultra-strength materials (2010, methodology): “published an experimental investigation in which micro-pillars were sculpted out from a substrate using focused ion beam (FIB) [145,146], and the mechanical properties of the pillars were tested using indenter with a flat punch head [147].”
Minimizing damage during FIB sample preparation of soft materials (2012, background): “There are several recent improvements to focused ionmilling technology designed to mitigate damage in FIBTEM sections (Mayer et al., 2007).”
Primary radiation damage: A review of current understanding and models (2018, background): “important inmodernmaterials processing by focused ion beams, or when irradiating nanomaterials [6,301].”