A review on coupled MEMS resonators for sensing applications utilizing mode localization

By Chun Zhao, M. Montaseri, G. Wood, S. H. Pu, A. Seshia, M. Kraft. 2016

241 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/727d0bcbf61ec810257fd9c621beaf18120b1e02