Optical lithography: Lithography at EUV wavelengths

By G. Tallents, E. Wagenaars, G. Pert. 2010

177 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/726646788e5cf611009da27180147a6c1790b77c