Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD

By W. Tenhaeff, K. Gleason. 2008

314 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/70ba322d602dcdbb08fe12f8ae506f43c88a9e42