Optimization of sensitivity and noise in piezoresistive cantilevers

By Xiaomei Yu, J. Thaysen, O. Hansen, Anja Boisen. 2002

164 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/70810e444702f9b8e884bd1aa5049c071b942da5

How researchers see this paper

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In Atomic and Molecular Physics, and Optics

1. Woo-Tae Park

In Electrical and Electronic Engineering

1. Woo-Tae Park

Citations in the corpus

• Review: Semiconductor Piezoresistance for Microsystems (2009, methodology): “As discussed already, several investigators have provided detailed device optimization analyses for given applications within very specific constraints [46], [57], [149], [181]–[183], [213], [262].”
• Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity (2007, background): “The sample is first sputtered with metal with a thickness on the order of nanometers; it is intended to increase reflectivity and has little effect on the device resonant frequency itself.”