Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography

By I. Märki, M. Salt, H. Herzig, R. Stanley, L. E. Melhaoui, P. Lyan, J. Fédéli. 2005

140 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/6f07a42a779a6c97987317db559a72eff4b578de