Magnetron sputter deposition: Linking discharge voltage with target properties

By D. Depla, S. Mahieu, R. Gryse. 2009

210 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/6ee5de8bd2b78b4c7c04d5671a482ecde04d47d3