Fabrication of strained Si on an ultrathin SiGe-on-insulator virtual substrate with a high-Ge fraction

By T. Tezuka, N. Sugiyama, S. Takagi. 2001

273 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6e68aaa19093c73bc7337a484062139fc8518745