Design and fabrication of MEMS thermoelectric generators with high temperature efficiency

By T. Huesgen, Peter Woias, Norbert Kockmann. 2008

200 citations recorded by the source corpus.

Subfields: Materials Chemistry, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/6e46e6a97c9890026c2246dea6a24924047955e3

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Materials Chemistry

1. H. Feng
2. Chengkuo Lee
3. Jin Xie

In Mechanical Engineering

1. H. Feng
2. Hung Cao
3. Ammar B. Kouki
4. Chengkuo Lee
5. Achraf Ben Amar
6. Jin Xie

Citations in the corpus

• Power Approaches for Implantable Medical Devices (2015, background): “human body is an unlimited heat-energy source, these generators’ lifetime is also naturally unlimited [85–88].”
• Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators (2010, methodology): “A device with a similar trench structure realized by wafer bonding is reported by [7], in which the authors fabricated n-poly-Si/Al thermopiles and covered the device surface with metal as a thermal contact pad to help optimize the heat flux.”