Post-CMOS processing for high-aspect-ratio integrated silicon microstructures

By Huikai Xie, L. Erdmann, Xu Zhu, K. J. Gabriel, G. Fedder. 2002

181 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6e38ccb266174dcd72783b4493d88e8ec9f8db0b