Effects of Plasma Activation on Hydrophilic Bonding of Si and SiO2

By T. Suni, K. Henttinen, I. Suni, J. Mäkinen. 2002

323 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1e44fea01e5bde8bc8c1616a66bd50abe3762ecc