Porous pSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared by PECVD

By A. Grill. 2009

172 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/6d87b17d873976b9a5ff54b380d1346222f68305