Silicon Carbide Microelectromechanical Systems for Harsh Environments

By R. Cheung. 2006

152 citations recorded by the source corpus.

Subfields: Ceramics and Composites

View Paper: https://www.semanticscholar.org/paper/6c8e772a872eb464395273060f35e2437ce18178

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Roya Maboudian
2. Carlo Carraro
3. John P. Alper
4. Mun Sek Kim
5. M. Vincent
6. B. Hsia
7. V. Radmilović
8. Nathan D. Masters

Citations in the corpus

• Silicon carbide nanowires as highly robust electrodes for micro-supercapacitors (2013, background): “SiC is known to be a wide-bandgap semiconductor material with excellent physicochemical stability, and is compatible with standard microfabrication techniques [13].”