High brightness inductively coupled plasma source for high current focused ion beam applications

By N. Smith, W. Skoczylas, S. Kellogg, D. Kinion, P. Tesch, O. Sutherland, A. Aanesland, R. Boswell. 2006

139 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/6b9f59f2507c03ce8b554ad4674497748a3414d2