Porous silica materials as low-k dielectrics for electronic and optical interconnects
By Anurag Jain, Svetlana Rogojevic, S. Ponoth, N. Agarwal, I. Matthew, W. Gill, P. Persans, M. Tomozawa, J. Plawsky, E. Simonyi. 2001
165 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials
View Paper: https://www.semanticscholar.org/paper/6b7ca04ec00d502b71cf9a860c489a39b3f26a33
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In Biomedical Engineering
In Electrical and Electronic Engineering
In Electronic, Optical and Magnetic Materials
Citations in the corpus
- Effective optical properties of non-absorbing nanoporous thin films (2006, methodology): “In a similar manner, nanoporous silicon and SiO2 have been used to manufacture waveguides [9–11], Bragg reflectors [12–18], Fabry-Perot filters [12,14, 16, 17, 19], and antireflection coatings [20, 21].”