Ion flux nonuniformities in large-area high-frequency capacitive discharges

By A. Perret, Pascal Chabert, J. Booth, J. Jolly, J. Guillon, P. Auvray. 2003

135 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/6b4f1627f886320363e101b9d4dcd631026a8f13