A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage

By Xinghui Li, Wei Gao, H. Muto, Y. Shimizu, S. Ito, S. Dian. 2013

206 citations recorded by the source corpus.

Subfields: Computational Mechanics, Computer Vision and Pattern Recognition, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/6b30ff66664bf642d1110f107dfc25654a49b334

Citations in the corpus

• An insight into optical metrology in manufacturing (2020, unknown): “It should be noted that the three-axis laser autocollimator can easily be combined with the three-axis surface encoder [58] introduced in the previous section to construct a six-degree-of-freedom (six-DOF) surface encoder that can measure three-axis translational displacements (XYZ) and three-axis a”